Inventor
LIN MU-TSANG
TW41 patents
⚠️ This page may combine multiple inventors who share the name “LIN MU-TSANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
33 patentsUS10811516B2Oct 20, 2020
Structure and formation method of semiconductor device structure with gate stack
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US10355135B2Jul 16, 2019
Semiconductor structure and fabricating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US10164050B2Dec 25, 2018
Structure and formation method of semiconductor device structure with gate stack
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9735256B2Aug 15, 2017
Method and structure for FinFET comprising patterned oxide and dielectric layer under spacer features
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9991385B2Jun 5, 2018
Enhanced volume control by recess profile control
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations83
US10818794B2Oct 27, 2020
Semiconductor structure and fabricating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10497701B2Dec 3, 2019
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10367079B2Jul 30, 2019
Method and structure for FinFET comprising patterned oxide and dielectric layer under spacer features
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9799771B2Oct 24, 2017
FinFET and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations73
US9627512B2Apr 18, 2017
Field effect transistor with non-doped channel
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations73
US9929254B2Mar 27, 2018
Method of manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9559207B2Jan 31, 2017
Semiconductor device having epitaxy structure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9646871B2May 9, 2017
Semiconductor structure with shallow trench isolation and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US11854851B2Dec 26, 2023
Interface tool
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11721746B2Aug 8, 2023
Method and structure for FinFET comprising patterned oxide and dielectric layer under spacer features
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11631748B2Apr 18, 2023
Structure and formation method of semiconductor device structure with gate stack
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11594534B2Feb 28, 2023
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11342458B2May 24, 2022
Semiconductor structure and fabricating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11018259B2May 25, 2021
Semiconductor device comprising gate structure and doped gate spacer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11004845B2May 11, 2021
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10879399B2Dec 29, 2020
Method of manufacturing semiconductor device comprising doped gate spacer
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12193164B2Jan 7, 2025
Oxygen and humidity control in storage device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11723152B2Aug 8, 2023
Oxygen and humidity control in storage device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56
US10749014B2Aug 18, 2020
Method and structure for FinFET comprising patterned oxide and dielectric layer under spacer features
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10636788B2Apr 28, 2020
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10084060B2Sep 25, 2018
Semiconductor structure and manufacturing method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations52
US10068982B2Sep 4, 2018
Structure and formation method of semiconductor device structure with metal gate
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations52
US9978648B2May 22, 2018
Manufacturing method of semiconductor device with regrown undoped channel and regrown S/D regions
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9812577B2Nov 7, 2017
Semiconductor structure and fabricating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10770569B2Sep 8, 2020
Semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10319842B2Jun 11, 2019
Method of manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9882013B2Jan 30, 2018
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
US9559165B2Jan 31, 2017
Semiconductor structure with strained source and drain structures and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations42
TAIWAN SEMICONDUCTOR MFG
8 patentsUS7117058B2Oct 3, 2006
Automatic statistical process control (SPC) chart generation apparatus and method thereof
TAIWAN SEMICONDUCTOR MFG55 citations87
US7254513B2Aug 7, 2007
Fault detection and classification (FDC) specification management apparatus and method thereof
TAIWAN SEMICONDUCTOR MFG11 citations80
US6444587B1Sep 3, 2002
Plasma etch method incorporating inert gas purge
TAIWAN SEMICONDUCTOR MFG10 citations72
US6980876B2Dec 27, 2005
Temperature-sensing wafer position detection system and method
TAIWAN SEMICONDUCTOR MFG6 citations54
US6920891B2Jul 26, 2005
Exhaust adaptor and method for chamber de-gassing
TAIWAN SEMICONDUCTOR MFG4 citations52
US6778875B2Aug 17, 2004
Noise filter for backside helium signal
TAIWAN SEMICONDUCTOR MFG2 citations50
US6595370B2Jul 22, 2003
Apparatus and method for reducing contamination in a wafer transfer chamber
TAIWAN SEMICONDUCTOR MFG1 citations45
US6733617B2May 11, 2004
Direct detection of dielectric etch system magnet driver and coil malfunctions
TAIWAN SEMICONDUCTOR MFG0 citations39