Inventor

STEGEMANN MAIK

DE35 patents

⚠️ This page may combine multiple inventors who share the name “STEGEMANN MAIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STEGEMANN MAIK

INFINEON TECHNOLOGIES DRESDEN GMBH

Micromechanical system and method for manufacturing a micromechanical system

Systems and methods for horizontal integration of acceleration sensor structures

Sensor structures, systems and methods with improved integration and optimized footprint

Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process

Method for manufacturing a micromechanical system

Emitter and method for manufacturing the same

Emitter and method for manufacturing the same

Method and structure for creating cavities with extreme aspect ratios

Integrated semiconductor device and manufacturing method

Sensor structures, systems and methods with improved integration and optimized footprint

Integrated semiconductor device and manufacturing method

Sensor structures, systems and methods with improved integration and optimized footprint

Pressure sensor device and manufacturing method

Method and structure for creating cavities with extreme aspect ratios

Method of forming a resonator

Microelectromechanical resonators

Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin region

INFINEON TECHNOLOGIES AG

Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device

Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device

Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures

Method for production of a semiconductor structure

Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device

Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures

Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process

Graded-index structure for optical systems

Graded-index structure for optical systems

Producing a buried cavity in a semiconductor substrate

Method of generating a germanium structure and optical device comprising a germanium structure

Method for contacting parts of a component integrated into a semiconductor substrate

INFINEON TECH DRESDEN GMBH & CO KG

Stressed decoupled micro-electro-mechanical system sensor

Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process

Contact hole

INFINEON TECHNOLOGIES AUSTRIA AG

Methods for manufacturing a MOSFET

Methods for manufacturing a MOSFET

STEGEMANN MAIK

Methods of stripping resist after metal deposition