Inventor
FROEHLICH HEIKO
DE30 patents
⚠️ This page may combine multiple inventors who share the name “FROEHLICH HEIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES DRESDEN GMBH
15 patentsUS9382111B2Jul 5, 2016
Micromechanical system and method for manufacturing a micromechanical system
INFINEON TECHNOLOGIES DRESDEN GMBH13 citations84
US9938133B2Apr 10, 2018
System and method for a comb-drive MEMS device
INFINEON TECHNOLOGIES DRESDEN GMBH10 citations83
US10683203B2Jun 16, 2020
Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
INFINEON TECHNOLOGIES DRESDEN GMBH1 citations62
US9376314B2Jun 28, 2016
Method for manufacturing a micromechanical system
INFINEON TECHNOLOGIES DRESDEN GMBH2 citations62
US10290805B2May 14, 2019
Emitter and method for manufacturing the same
INFINEON TECHNOLOGIES DRESDEN GMBH0 citations52
US9887355B2Feb 6, 2018
Emitter and method for manufacturing the same
INFINEON TECHNOLOGIES DRESDEN GMBH1 citations52
US9663355B2May 30, 2017
Method and structure for creating cavities with extreme aspect ratios
INFINEON TECHNOLOGIES DRESDEN GMBH0 citations52
US10544037B2Jan 28, 2020
Integrated semiconductor device and manufacturing method
INFINEON TECHNOLOGIES DRESDEN GMBH0 citations51
US10060816B2Aug 28, 2018
Sensor structures, systems and methods with improved integration and optimized footprint
INFINEON TECHNOLOGIES DRESDEN GMBH0 citations51
US9896329B2Feb 20, 2018
Integrated semiconductor device and manufacturing method
INFINEON TECHNOLOGIES DRESDEN GMBH0 citations51
US9752943B2Sep 5, 2017
Sensor structures, systems and methods with improved integration and optimized footprint
INFINEON TECHNOLOGIES DRESDEN GMBH0 citations51
US10386255B2Aug 20, 2019
Pressure sensor device and manufacturing method
INFINEON TECHNOLOGIES DRESDEN GMBH0 citations50
US9641153B2May 2, 2017
Method of forming a resonator
INFINEON TECHNOLOGIES DRESDEN GMBH0 citations48
US9209778B2Dec 8, 2015
Microelectromechanical resonators
INFINEON TECHNOLOGIES DRESDEN GMBH0 citations48
US9452923B2Sep 27, 2016
Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin region
INFINEON TECHNOLOGIES DRESDEN GMBH0 citations41
INFINEON TECHNOLOGIES AG
13 patentsUS11422151B2Aug 23, 2022
Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device
INFINEON TECHNOLOGIES AG1 citations72
US10684306B2Jun 16, 2020
Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device
INFINEON TECHNOLOGIES AG1 citations72
US10681777B2Jun 9, 2020
Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures
INFINEON TECHNOLOGIES AG2 citations72
US11428661B2Aug 30, 2022
Method for producing a moisture sensor at the wafer level and moisture sensor
INFINEON TECHNOLOGIES AG4 citations69
US12332271B2Jun 17, 2025
Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device
INFINEON TECHNOLOGIES AG0 citations62
US12137500B2Nov 5, 2024
Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures
INFINEON TECHNOLOGIES AG0 citations62
US11015980B2May 25, 2021
Infrared radiation sensors and methods of manufacturing infrared radiation sensors
INFINEON TECHNOLOGIES AG0 citations58
US11754522B2Sep 12, 2023
Moisture sensor
INFINEON TECHNOLOGIES AG0 citations54
US11486848B2Nov 1, 2022
Moisture sensor
INFINEON TECHNOLOGIES AG0 citations54
US10347778B2Jul 9, 2019
Graded-index structure for optical systems
INFINEON TECHNOLOGIES AG0 citations52
US10084101B2Sep 25, 2018
Graded-index structure for optical systems
INFINEON TECHNOLOGIES AG0 citations52
US11594654B2Feb 28, 2023
Method of generating a germanium structure and optical device comprising a germanium structure
INFINEON TECHNOLOGIES AG0 citations50
US11239375B2Feb 1, 2022
Method for manufacturing a pressure sensitive field effect transistor including a membrane structure
INFINEON TECHNOLOGIES AG0 citations48
INFINEON TECH DRESDEN GMBH & CO KG
2 patentsUS10870575B2Dec 22, 2020
Stressed decoupled micro-electro-mechanical system sensor
INFINEON TECH DRESDEN GMBH & CO KG2 citations71
US11078072B2Aug 3, 2021
Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
INFINEON TECH DRESDEN GMBH & CO KG0 citations62