Inventor
FUJIYAMA Yasuharu
JP2 patents
Patents
2 patentsUS10910474B2Feb 2, 2021
Group III nitride semiconductor substrate and method for manufacturing group III nitride semiconductor substrate
FURUKAWA CO LTD0 citations56
US11011374B2May 18, 2021
Group III nitride semiconductor substrate and method for manufacturing group III nitride semiconductor substrate
FURUKAWA CO LTD0 citations39