Inventor
SUBRAHMANYAN PRADEEP
US9 patents
⚠️ This page may combine multiple inventors who share the name “SUBRAHMANYAN PRADEEP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
6 patentsUS10409171B2Sep 10, 2019
Overlay control with non-zero offset prediction
KLA TENCOR CORP3 citations71
US10216096B2Feb 26, 2019
Process-sensitive metrology systems and methods
KLA TENCOR CORP2 citations71
US10209627B2Feb 19, 2019
Systems and methods for focus-sensitive metrology targets
KLA TENCOR CORP2 citations70
US8779635B2Jul 15, 2014
Arrangement of reticle positioning device for actinic inspection of EUV reticles
KLA TENCOR CORP2 citations61
US8772731B2Jul 8, 2014
Apparatus and method for synchronizing sample stage motion with a time delay integration charge-couple device in a semiconductor inspection tool
KLA TENCOR CORP2 citations61
US10381256B2Aug 13, 2019
Apparatus and method for chucking warped wafers
KLA TENCOR CORP1 citations53
APPLIED MATERIALS INC
3 patentsUS10670393B1Jun 2, 2020
Construction of three-dimensional profiles of high aspect ratio structures using top down imaging
APPLIED MATERIALS INC2 citations70
US12217974B2Feb 4, 2025
Localized stress modulation by implant to back of wafer
APPLIED MATERIALS INC0 citations59
US11092433B2Aug 17, 2021
Construction of three-dimensional profiles of high aspect ratio structures using top down imaging
APPLIED MATERIALS INC0 citations59