Inventor
TANNO KAZUISHI
JP10 patents
Patents
10 patentsUS9052592B2Jun 9, 2015
Resist composition and resist pattern forming method
TOKYO OHKA KOGYO CO LTD16 citations83
US11150554B2Oct 19, 2021
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD1 citations60
US11036132B2Jun 15, 2021
Resist composition, method of forming resist pattern, compound, and acid diffusion control agent
TOKYO OHKA KOGYO CO LTD1 citations60
US10534263B2Jan 14, 2020
Resin composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD1 citations60
US11036131B2Jun 15, 2021
Resist composition, method of forming resist pattern, and compound
TOKYO OHKA KOGYO CO LTD0 citations51
US11333973B2May 17, 2022
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations44
US9235123B2Jan 12, 2016
Resist composition and resist pattern forming method
TOKYO OHKA KOGYO CO LTD0 citations41
US9529266B2Dec 27, 2016
Method of forming pattern
TOKYO OHKA KOGYO CO LTD0 citations40
US9274424B2Mar 1, 2016
Resist composition and resist pattern forming method
TOKYO OHKA KOGYO CO LTD0 citations40
US10534264B2Jan 14, 2020
Resist composition and resist pattern forming method
TOKYO OHKA KOGYO CO LTD0 citations39