Inventor
KADAM ANKUR
ID10 patents
Patents
10 patentsUS9903020B2Feb 27, 2018
Generation of compact alumina passivation layers on aluminum plasma equipment components
APPLIED MATERIALS INC108 citations96
US12497692B2Dec 16, 2025
Halogen resistant coatings and methods of making and using thereof
APPLIED MATERIALS INC0 citations59
US11739429B2Aug 29, 2023
Methods for refurbishing aerospace components
APPLIED MATERIALS INC1 citations59
US11639547B2May 2, 2023
Halogen resistant coatings and methods of making and using thereof
APPLIED MATERIALS INC0 citations59
US10233554B2Mar 19, 2019
Aluminum electroplating and oxide formation as barrier layer for aluminum semiconductor process equipment
APPLIED MATERIALS INC1 citations59
US12201025B2Jan 14, 2025
Physical vapor deposition of piezoelectric films
APPLIED MATERIALS INC0 citations58
US11489105B2Nov 1, 2022
Physical vapor deposition of piezoelectric films
APPLIED MATERIALS INC1 citations58
US11976357B2May 7, 2024
Methods for forming a protective coating on processing chamber surfaces or components
APPLIED MATERIALS INC0 citations50
US10253406B2Apr 9, 2019
Method for forming yttrium oxide on semiconductor processing equipment
APPLIED MATERIALS INC0 citations49
US10407789B2Sep 10, 2019
Uniform crack-free aluminum deposition by two step aluminum electroplating process
APPLIED MATERIALS INC0 citations37