Inventor
KALSEKAR VIREN
US14 patents
Patents
14 patentsUS11626303B2Apr 11, 2023
Compliance components for semiconductor processing system
APPLIED MATERIALS INC5 citations72
US12588451B2Mar 24, 2026
Bottom purge for semiconductor processing system
APPLIED MATERIALS INC0 citations61
US11984305B2May 14, 2024
Substrate pedestal for improved substrate processing
APPLIED MATERIALS INC0 citations60
US11587773B2Feb 21, 2023
Substrate pedestal for improved substrate processing
APPLIED MATERIALS INC0 citations60
US10923334B2Feb 16, 2021
Selective deposition of hardmask
APPLIED MATERIALS INC0 citations60
US11699602B2Jul 11, 2023
Substrate support assemblies and components
APPLIED MATERIALS INC1 citations59
US11569072B2Jan 31, 2023
RF grounding configuration for pedestals
APPLIED MATERIALS INC0 citations59
US12136549B2Nov 5, 2024
Plasma-enhanced chemical vapor deposition of carbon hard-mask
APPLIED MATERIALS INC0 citations58
US11515176B2Nov 29, 2022
Thermally controlled lid stack components
APPLIED MATERIALS INC1 citations56
US12557254B2Feb 17, 2026
Two-piece RF shield design
APPLIED MATERIALS INC0 citations51
US12266550B2Apr 1, 2025
Multiple process semiconductor processing system
APPLIED MATERIALS INC0 citations50
US12062526B2Aug 13, 2024
Semiconductor processing chamber architecture for higher throughput and faster transition time
APPLIED MATERIALS INC0 citations49
US11560623B2Jan 24, 2023
Methods of reducing chamber residues
APPLIED MATERIALS INC0 citations48
US12563991B2Feb 24, 2026
Thermal choke plate
APPLIED MATERIALS INC0 citations46