Inventor
IBATA KEIICHI
JP5 patents
Patents
5 patentsUS11921425B2Mar 5, 2024
Hard mask-forming composition and method for manufacturing electronic component
TOKYO OHKA KOGYO CO LTD0 citations58
US11650503B2May 16, 2023
Hard mask-forming composition and method for manufacturing electronic component
TOKYO OHKA KOGYO CO LTD0 citations58
US11746189B2Sep 5, 2023
Hard-mask forming composition, method for manufacturing electronic component, and resin
TOKYO OHKA KOGYO CO LTD0 citations54
US11248086B2Feb 15, 2022
Hard-mask forming composition and method for manufacturing electronic component
TOKYO OHKA KOGYO CO LTD0 citations48
US12221556B2Feb 11, 2025
Hard-mask forming composition, method for manufacturing electronic component, and compound and resin
TOKYO OHKA KOGYO CO LTD0 citations44