Inventor
SHUDO SHINICHI
JP11 patents
Patents
11 patentsUS10201927B2Feb 12, 2019
Imprint apparatus, foreign particle removal method, and method of manufacturing article
CANON KK5 citations72
US11454885B2Sep 27, 2022
Imprint apparatus and article manufacturing method
CANON KK1 citations59
US12429764B2Sep 30, 2025
Measurement method, imprint apparatus, and article manufacturing method
CANON KK0 citations56
US11988956B2May 21, 2024
Measurement method, imprint apparatus, and article manufacturing method
CANON KK0 citations56
US10112324B2Oct 30, 2018
Imprint method, imprint apparatus, and production method for article
CANON KK1 citations51
US9952504B2Apr 24, 2018
Imprint method, imprint apparatus, and method for manufacturing device
CANON KK1 citations51
US10814534B2Oct 27, 2020
Discharge apparatus, imprint apparatus, method of detection, method of determination, and method for manufacturing article
CANON KK0 citations50
US12447667B2Oct 21, 2025
Imprint apparatus and article manufacturing method
CANON KK0 citations49
US11520229B2Dec 6, 2022
Imprint apparatus and method of manufacturing article
CANON KK0 citations49
US9339970B2May 17, 2016
Imprint apparatus, and article manufacturing method
CANON KK0 citations44
US11822234B2Nov 21, 2023
Imprint apparatus, imprint method, and article manufacturing method
CANON KK0 citations40