Inventor
SEO MINHWAN
KR10 patents
⚠️ This page may combine multiple inventors who share the name “SEO MINHWAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
9 patentsUS12538758B2Jan 27, 2026
Substrate inspection system and method of manufacturing semiconductor device using substrate inspection system
SAMSUNG ELECTRONICS CO LTD0 citations56
US11823961B2Nov 21, 2023
Substrate inspection system and method of manufacturing semiconductor device using substrate inspection system
SAMSUNG ELECTRONICS CO LTD1 citations56
US11946809B2Apr 2, 2024
Polarization measuring device and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US11823927B2Nov 21, 2023
Wafer inspection apparatus and system including the same
SAMSUNG ELECTRONICS CO LTD0 citations48
US12313393B2May 27, 2025
Level sensor and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations47
US12557587B2Feb 17, 2026
Apparatus and method monitoring semiconductor manufacturing equipment
SAMSUNG ELECTRONICS CO LTD0 citations46
US12387963B2Aug 12, 2025
Optical assembly for alignment inspection, optical apparatus including the same, die bonding system and die bonding method using the same
SAMSUNG ELECTRONICS CO LTD0 citations46
US12366444B2Jul 22, 2025
Optical assembly for parallelism measurement, optical apparatus including the same, die bonding system and die bonding method using the same
SAMSUNG ELECTRONICS CO LTD0 citations45
US11898912B2Feb 13, 2024
Hyperspectral imaging (HSI) apparatus and inspection apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations45