Inventor
PENG CHEN-HUANG
TW4 patents
Patents
4 patentsUS10516030B2Dec 24, 2019
Contact plugs and methods forming same
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations81
US10930752B2Feb 23, 2021
Contact plugs and methods forming same
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US12464751B2Nov 4, 2025
Contact plugs and methods forming same
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US11862708B2Jan 2, 2024
Contact plugs and methods forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59