Inventor
ENTLEY WILLIAM ROBERT
US10 patents
⚠️ This page may combine multiple inventors who share the name “ENTLEY WILLIAM ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VERSUM MAT US LLC
8 patentsUS10249489B2Apr 2, 2019
Use of silyl bridged alkyl compounds for dense OSG films
VERSUM MAT US LLC7 citations80
US10395920B2Aug 27, 2019
Alkyl-alkoxysilacyclic compounds
VERSUM MAT US LLC2 citations72
US10106890B2Oct 23, 2018
Compositions and methods using same for deposition of silicon-containing film
VERSUM MAT US LLC3 citations71
US12049695B2Jul 30, 2024
Compositions and methods using same for deposition of silicon-containing film
VERSUM MAT US LLC0 citations61
US11884689B2Jan 30, 2024
Alkoxysilacyclic or acyloxysilacyclic compounds and methods for depositing films using same
VERSUM MAT US LLC1 citations61
US11158498B2Oct 26, 2021
Silicon compounds and methods for depositing films using same
VERSUM MAT US LLC1 citations60
US12563982B2Feb 24, 2026
Additives to enhance the properties of dielectric films
VERSUM MAT US LLC0 citations50
US11164739B2Nov 2, 2021
Use of silicon structure former with organic substituted hardening additive compounds for dense OSG films
VERSUM MAT US LLC0 citations49