Inventor
FOVELL RICHARD C
US8 patents
⚠️ This page may combine multiple inventors who share the name “FOVELL RICHARD C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS11049694B2Jun 29, 2021
Modular microwave source with embedded ground surface
APPLIED MATERIALS INC12 citations85
US11670489B2Jun 6, 2023
Modular microwave source with embedded ground surface
APPLIED MATERIALS INC4 citations74
US11881384B2Jan 23, 2024
Monolithic modular microwave source with integrated process gas distribution
APPLIED MATERIALS INC2 citations71
US12191118B2Jan 7, 2025
Monolithic modular microwave source with integrated process gas distribution
APPLIED MATERIALS INC0 citations61
US12144090B2Nov 12, 2024
Monolithic modular microwave source with integrated temperature control
APPLIED MATERIALS INC0 citations61
US11564292B2Jan 24, 2023
Monolithic modular microwave source with integrated temperature control
APPLIED MATERIALS INC1 citations61
US11915850B2Feb 27, 2024
Two channel cosine-theta coil assembly
APPLIED MATERIALS INC0 citations50