Inventor
SHINODA HIROYUKI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “SHINODA HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
3 patentsUS6087673AJul 11, 2000
Method of inspecting pattern and apparatus thereof
HITACHI LTD58 citations96
US6236057B1May 22, 2001
Method of inspecting pattern and apparatus thereof with a differential brightness image detection
HITACHI LTD15 citations92
US6376854B2Apr 23, 2002
Method of inspecting a pattern on a substrate
HITACHI LTD8 citations74