Inventor
HASSAN VINAYAK VISHWANATH
US14 patents
Patents
14 patentsUS9612522B2Apr 4, 2017
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor
APPLIED MATERIALS INC36 citations93
US10551732B2Feb 4, 2020
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor
APPLIED MATERIALS INC1 citations72
US9581889B2Feb 28, 2017
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor
APPLIED MATERIALS INC3 citations72
US9581890B2Feb 28, 2017
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof
APPLIED MATERIALS INC3 citations72
US11069514B2Jul 20, 2021
Remote capacitively coupled plasma source with improved ion blocker
APPLIED MATERIALS INC3 citations71
US11721545B2Aug 8, 2023
Method of using dual frequency RF power in a process chamber
APPLIED MATERIALS INC2 citations70
US11996273B2May 28, 2024
Methods of seasoning process chambers
APPLIED MATERIALS INC0 citations61
US12106958B2Oct 1, 2024
Method of using dual frequency RF power in a process chamber
APPLIED MATERIALS INC0 citations60
US12460298B2Nov 4, 2025
Showerhead design to control stray deposition
APPLIED MATERIALS INC0 citations59
US12142468B2Nov 12, 2024
Stress treatments for cover wafers
APPLIED MATERIALS INC0 citations58
US10197907B2Feb 5, 2019
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor
APPLIED MATERIALS INC0 citations51
US10012897B2Jul 3, 2018
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor
APPLIED MATERIALS INC0 citations51
US10012908B2Jul 3, 2018
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof
APPLIED MATERIALS INC0 citations51
US9690016B2Jun 27, 2017
Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof
APPLIED MATERIALS INC0 citations51