Inventor

KUMAR BHASKAR

US27 patents

⚠️ This page may combine multiple inventors who share the name “KUMAR BHASKAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KUMAR BHASKAR

APPLIED MATERIALS INC

Aluminum nitride barrier layer

Plasma parameters and skew characterization by high speed imaging

Selective poreseal deposition prevention and residue removal using SAM

Remote capacitively coupled plasma source with improved ion blocker

Method of using dual frequency RF power in a process chamber

Chucking process and system for substrate processing chambers

Methods of forming hardmasks

Thin film encapsulation-thin ultra high barrier layer for OLED application

Methods of seasoning process chambers

Techniques to improve adhesion and defects for tungsten carbide film

Plasma parameters and skew characterization by high speed imaging

Plasma density control on substrate edge

Apparatus and methods for removing contaminant particles in a plasma process

Technique to prevent aluminum fluoride build up on the heater

Method of using dual frequency RF power in a process chamber

Chucking process and system for substrate processing chambers

Graded dimple height pattern on heater for lower backside damage and low chucking voltage

Showerhead design to control stray deposition

Shunt door for magnets in plasma process chamber

Stress treatments for cover wafers

Gallium arsenide based materials used in thin film transistor applications

Apparatus and methods for removing contaminant particles in a plasma process

Interconnect integration for sidewall pore seal and via cleanliness

Plasma density control on substrate edge

Aluminum fluoride mitigation by plasma treatment

SINGH KAUSHAL K

High efficiency thin film transistor device with gallium arsenide layer

SHENG SHURAN

High quality TCO-silicon interface contact structure for high efficiency thin film silicon solar cells