Inventor
ALAYAVALLI KAUSHIK
US12 patents
Patents
12 patentsUS10889894B2Jan 12, 2021
Faceplate with embedded heater
APPLIED MATERIALS INC7 citations82
US10276353B2Apr 30, 2019
Dual-channel showerhead for formation of film stacks
APPLIED MATERIALS INC4 citations71
US10600624B2Mar 24, 2020
System and method for substrate processing chambers
APPLIED MATERIALS INC5 citations70
US12106958B2Oct 1, 2024
Method of using dual frequency RF power in a process chamber
APPLIED MATERIALS INC0 citations60
US11495454B2Nov 8, 2022
Deposition of low-stress boron-containing layers
APPLIED MATERIALS INC0 citations60
US11404263B2Aug 2, 2022
Deposition of low-stress carbon-containing layers
APPLIED MATERIALS INC0 citations60
US10907252B2Feb 2, 2021
Horizontal heat choke faceplate design
APPLIED MATERIALS INC0 citations60
US11959174B2Apr 16, 2024
Shunt door for magnets in plasma process chamber
APPLIED MATERIALS INC1 citations59
US12142468B2Nov 12, 2024
Stress treatments for cover wafers
APPLIED MATERIALS INC0 citations58
US10910238B2Feb 2, 2021
Heater pedestal assembly for wide range temperature control
APPLIED MATERIALS INC0 citations51
US11798820B2Oct 24, 2023
Gas delivery systems and methods
APPLIED MATERIALS INC0 citations49
US12068153B2Aug 20, 2024
Situ clean for bevel and edge ring
APPLIED MATERIALS INC0 citations47