Inventor
KRISHNA GOPU
KR5 patents
⚠️ This page may combine multiple inventors who share the name “KRISHNA GOPU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS11501957B2Nov 15, 2022
Pedestal support design for precise chamber matching and process control
APPLIED MATERIALS INC4 citations71
US10679827B2Jun 9, 2020
Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformity
APPLIED MATERIALS INC3 citations64
US11098404B2Aug 24, 2021
Multi-station chamber lid with precise temperature and flow control
APPLIED MATERIALS INC1 citations61
US11610800B2Mar 21, 2023
Capacitive method of detecting wafer chucking and de-chucking
APPLIED MATERIALS INC0 citations41