Inventor
HIROTA KOSA
JP7 patents
Patents
7 patentsUS9741629B2Aug 22, 2017
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP3 citations71
US11424110B2Aug 23, 2022
Plasma processing apparatus and operational method thereof
HITACHI HIGH TECH CORP0 citations61
US12368031B2Jul 22, 2025
Plasma processing method
HITACHI HIGH TECH CORP0 citations59
US11355324B2Jun 7, 2022
Plasma processing method
HITACHI HIGH TECH CORP0 citations59
US9767997B2Sep 19, 2017
Plasma processing apparatus and operational method thereof
HITACHI HIGH TECH CORP0 citations51
US12154765B2Nov 26, 2024
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations49
US12573593B2Mar 10, 2026
Plasma processing method
HITACHI HIGH TECH CORP0 citations47