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Inventor
NAKAUNE KOICHI
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “NAKAUNE KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
2 patents
US12368031B2
Jul 22, 2025
Plasma processing method
HITACHI HIGH TECH CORP
0 citations
59
US11355324B2
Jun 7, 2022
Plasma processing method
HITACHI HIGH TECH CORP
0 citations
59
HITACHI LTD
1 patent
US6960533B2
Nov 1, 2005
Method of processing a sample surface having a masking material and an anti-reflective film using a plasma
HITACHI LTD
1 citations
43