Inventor
INOUE SATOMI
JP42 patents
⚠️ This page may combine multiple inventors who share the name “INOUE SATOMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
30 patentsUS10008370B2Jun 26, 2018
Plasma processing apparatus and operation method thereof
HITACHI HIGH TECH CORP23 citations94
US10453695B2Oct 22, 2019
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP7 citations84
US9934946B2Apr 3, 2018
Plasma processing apparatus and operating method of plasma processing apparatus
HITACHI HIGH TECH CORP9 citations84
US10672595B2Jun 2, 2020
Plasma processing apparatus and operation method thereof
HITACHI HIGH TECH CORP3 citations73
US10020233B2Jul 10, 2018
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP2 citations71
US9741629B2Aug 22, 2017
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP3 citations71
US12442770B2Oct 14, 2025
Plasma processing apparatus, plasma processing method and plasma processing analysis method
HITACHI HIGH TECH CORP0 citations62
US11605530B2Mar 14, 2023
Plasma processing apparatus, data processing apparatus and data processing method
HITACHI HIGH TECH CORP0 citations62
US11404253B2Aug 2, 2022
Plasma processing apparatus and analysis method for analyzing plasma processing data
HITACHI HIGH TECH CORP0 citations62
US11308182B2Apr 19, 2022
Data processing method, data processing apparatus and processing apparatus
HITACHI HIGH TECH CORP0 citations62
US10734207B2Aug 4, 2020
Plasma processing apparatus and analysis method for analyzing plasma processing data
HITACHI HIGH TECH CORP1 citations62
US12014909B2Jun 18, 2024
Plasma processing apparatus and plasma processing system
HITACHI HIGH TECH CORP0 citations61
US11424110B2Aug 23, 2022
Plasma processing apparatus and operational method thereof
HITACHI HIGH TECH CORP0 citations61
US10872750B2Dec 22, 2020
Plasma processing apparatus and plasma processing system
HITACHI HIGH TECH CORP1 citations61
US12368031B2Jul 22, 2025
Plasma processing method
HITACHI HIGH TECH CORP0 citations59
US11355324B2Jun 7, 2022
Plasma processing method
HITACHI HIGH TECH CORP0 citations59
US10408762B2Sep 10, 2019
Plasma processing apparatus, plasma processing method and plasma processing analysis method
HITACHI HIGH TECH CORP0 citations52
US10262840B2Apr 16, 2019
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations52
US10153217B2Dec 11, 2018
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP1 citations52
US10783220B2Sep 22, 2020
Data processing method, data processing apparatus and processing apparatus
HITACHI HIGH TECH CORP0 citations51
US10615010B2Apr 7, 2020
Plasma processing apparatus, data processing apparatus and data processing method
HITACHI HIGH TECH CORP0 citations51
US10073818B2Sep 11, 2018
Data processing method, data processing apparatus and processing apparatus
HITACHI HIGH TECH CORP0 citations51
US9865439B2Jan 9, 2018
Plasma processing apparatus
HITACHI HIGH TECH CORP1 citations51
US9767997B2Sep 19, 2017
Plasma processing apparatus and operational method thereof
HITACHI HIGH TECH CORP0 citations51
US10872774B2Dec 22, 2020
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations50
US8588962B2Nov 19, 2013
Vacuum processing device and method of transporting process subject member
HITACHI HIGH TECH CORP1 citations48
US9805940B2Oct 31, 2017
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations41
US9190336B2Nov 17, 2015
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations40
US9507328B2Nov 29, 2016
Processing chamber allocation setting device and processing chamber allocation setting program
HITACHI HIGH TECH CORP0 citations39
US9257318B2Feb 9, 2016
Operation method for vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations37
NIPPON TELEGRAPH & TELEPHONE
4 patentsUS11954512B2Apr 9, 2024
Control device and control method
NIPPON TELEGRAPH & TELEPHONE0 citations52
US11323385B2May 3, 2022
Communication system and communication method
NIPPON TELEGRAPH & TELEPHONE0 citations52
US11212206B2Dec 28, 2021
Control device and control method
NIPPON TELEGRAPH & TELEPHONE0 citations52
US11979255B2May 7, 2024
Communication system and communication method
NIPPON TELEGRAPH & TELEPHONE0 citations50
MORISAWA TOSHIHIRO
3 patentsUS9110461B2Aug 18, 2015
Semiconductor manufacturing equipment
MORISAWA TOSHIHIRO13 citations82
US8924001B2Dec 30, 2014
Etching apparatus, control simulator, and semiconductor device manufacturing method
MORISAWA TOSHIHIRO5 citations71
US8486290B2Jul 16, 2013
Etching apparatus, analysis apparatus, etching treatment method, and etching treatment program
MORISAWA TOSHIHIRO5 citations71