Inventor

LIAO CHUN-HUNG

TW26 patents

⚠️ This page may combine multiple inventors who share the name “LIAO CHUN-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LIAO CHUN-HUNG

TAIWAN SEMICONDUCTOR MFG CO LTD

Slurry compositions for chemical mechanical planarization

Chemical mechanical polishing slurry composition and method of polishing metal layer

Source/drain contact for semiconductor device structure

Chemical mechanical polishing slurry composition and method of polishing metal layer

Slurry compositions for chemical mechanical planarization

Method for manufacturing a semiconductor using slurry

Chemical mechanical polishing slurry composition and method of polishing metal layer

Slurry enhancement for polishing system

Semiconductor structure with oxidized ruthenium

Method for forming semiconductor device structure with source/drain contact

Slurry

Materials and methods for chemical mechanical polishing of ruthenium-containing materials

Materials and methods for chemical mechanical polishing of ruthenium-containing materials

Conductive structure interconnects with downward projections

Fabrication of a polishing pad for chemical mechanical polishing

Fabrication of a polishing pad for chemical mechanical polishing

Semiconductor device and manufacturing method thereof

Wafer polishing with separated chemical reaction and mechanical polishing

Ruthenium-containing semiconductor structure and method of manufacturing the same

Slurry and manufacturing semiconductor using the slurry

In-situ defect count detection in post chemical mechanical polishing

E INK HOLDINGS INC

Field effect transistor

Thin film transistor and method for manufacturing the same

MICROJET TECHNOLOGY CO LTD

Driving system for driving piezoelectric pump

Miniature piezoelectric pump module

WU CHEN HAO

Post CMP cleaning apparatus and post CMP cleaning methods