Inventor
BAILEY JOEL BRAD
US10 patents
⚠️ This page may combine multiple inventors who share the name “BAILEY JOEL BRAD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS6676800B1Jan 13, 2004
Particle contamination cleaning from substrates using plasmas, reactive gases, and mechanical agitation
APPLIED MATERIALS INC38 citations86
US6878636B2Apr 12, 2005
Method for enhancing substrate processing
APPLIED MATERIALS INC13 citations83
US6805137B2Oct 19, 2004
Method for removing contamination particles from substrates
APPLIED MATERIALS INC18 citations82
US6779226B2Aug 24, 2004
Factory interface particle removal platform
APPLIED MATERIALS INC14 citations82
US6725564B2Apr 27, 2004
Processing platform with integrated particle removal system
APPLIED MATERIALS INC10 citations71
US6684523B2Feb 3, 2004
Particle removal apparatus
APPLIED MATERIALS INC12 citations71