P

Inventor

PYATIGORSKY GRIGORY

US7 patents
⚠️ This page may combine multiple inventors who share the name “PYATIGORSKY GRIGORY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

5 patents
US5964643AOct 12, 1999

Apparatus and method for in-situ monitoring of chemical mechanical polishing operations

APPLIED MATERIALS INC458 citations98
US5612850AMar 18, 1997

Releasing a workpiece from an electrostatic chuck

APPLIED MATERIALS INC52 citations95
US5459632AOct 17, 1995

Releasing a workpiece from an electrostatic chuck

APPLIED MATERIALS INC96 citations95
US7841926B2Nov 30, 2010

Substrate polishing metrology using interference signals

APPLIED MATERIALS INC8 citations83
US7731566B2Jun 8, 2010

Substrate polishing metrology using interference signals

APPLIED MATERIALS INC8 citations83

BIRANG MANOOCHER

2 patents
US8556679B2Oct 15, 2013

Substrate polishing metrology using interference signals

BIRANG MANOOCHER1 citations60
US8092274B2Jan 10, 2012

Substrate polishing metrology using interference signals

BIRANG MANOOCHER3 citations60