Inventor

GOTO HIDEJI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “GOTO HIDEJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

5 patents

US5486896AJan 23, 1996

Exposure apparatus

NIKON CORP80 citations95

US5777722AJul 7, 1998

Scanning exposure apparatus and method

NIKON CORP39 citations92

US5502313AMar 26, 1996

Exposure apparatus and method having a measuring unit for measuring distances between a mask surface and a projection optical system

NIKON CORP26 citations92

US6213607B1Apr 10, 2001

Exposure apparatus and field stop thereof

NIKON CORP16 citations91

US5936712AAug 10, 1999

Exposure method and apparatus including focus control

NIKON CORP8 citations69

NIPPON KOGAKU KK

1 patent

US6325516B1Dec 4, 2001

Exposure apparatus and field stop thereof

NIPPON KOGAKU KK7 citations72