Inventor
MURAKAMI MASAICHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “MURAKAMI MASAICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
8 patentsUS4860374AAug 22, 1989
Apparatus for detecting position of reference pattern
NIKON CORP109 citations96
US5486896AJan 23, 1996
Exposure apparatus
NIKON CORP80 citations95
US5920378AJul 6, 1999
Projection exposure apparatus
NIKON CORP42 citations92
US5912726AJun 15, 1999
Projection exposure apparatus and method having a positional deviation detection system that employs light from an exposure illumination system
NIKON CORP47 citations92
US4806987AFeb 21, 1989
Projection-exposing apparatus
NIKON CORP8 citations74
US5442418AAug 15, 1995
Exposure method
NIKON CORP17 citations71
US6356341B1Mar 12, 2002
Exposure device, beam shape setting device and illuminating area setting device
NIKON CORP10 citations67
US6873400B2Mar 29, 2005
Scanning exposure method and system
NIKON CORP4 citations61
NIPPON KOGAKU KK
4 patentsUS4741622AMay 3, 1988
Method and apparatus for detecting diversion
NIPPON KOGAKU KK40 citations92
US4704020ANov 3, 1987
Projection optical apparatus
NIPPON KOGAKU KK32 citations92
US4679942AJul 14, 1987
Method of aligning a semiconductor substrate and a photomask
NIPPON KOGAKU KK27 citations92
USH1733HJun 2, 1998
Exposure method
NIPPON KOGAKU KK0 citations41