Inventor
KASHIDA MEGURU
JP45 patents
⚠️ This page may combine multiple inventors who share the name “KASHIDA MEGURU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
43 patentsUS5723860AMar 3, 1998
Frame-supported pellicle for photomask protection
SHINETSU CHEMICAL CO53 citations96
US7776473B2Aug 17, 2010
Silicon-silicon oxide-lithium composite, making method, and non-aqueous electrolyte secondary cell negative electrode material
SHINETSU CHEMICAL CO53 citations94
US6436586B1Aug 20, 2002
Pellicle with a filter and method for production thereof
SHINETSU CHEMICAL CO48 citations93
US5834143ANov 10, 1998
Frame-supported dustproof pellicle for photolithographic photomask
SHINETSU CHEMICAL CO26 citations93
US5378514AJan 3, 1995
Frame-supported pellicle for photolithography
SHINETSU CHEMICAL CO36 citations93
US5286567AFeb 15, 1994
Pellicle for photolithographic mask
SHINETSU CHEMICAL CO34 citations93
US4849491AJul 18, 1989
Curable organopolysiloxane composition
SHINETSU CHEMICAL CO48 citations93
US5693382ADec 2, 1997
Frame-supported pellicle for dustproof protection of photomask in photolithography
SHINETSU CHEMICAL CO36 citations92
US5691088ANov 25, 1997
Pellicle for protection of photolithographic mask
SHINETSU CHEMICAL CO26 citations92
US5616927AApr 1, 1997
Frame-supported pellicle for dustproof protection of photomask
SHINETSU CHEMICAL CO30 citations92
US5209996AMay 11, 1993
Membrane consisting of silicon carbide and silicon nitride, method for the preparation thereof and mask for X-ray lithography utilizing the same
SHINETSU CHEMICAL CO27 citations92
US5139633AAug 18, 1992
Film-forming on substrate by sputtering
SHINETSU CHEMICAL CO28 citations92
US5132366AJul 21, 1992
Curable silicone composition
SHINETSU CHEMICAL CO25 citations92
US4726964AFeb 23, 1988
Method for imparting releasability to a substrate surface
SHINETSU CHEMICAL CO40 citations92
US5470621ANov 28, 1995
Frame-supported pellicle for dustproof protection of photomask
SHINETSU CHEMICAL CO34 citations91
US7425283B2Sep 16, 2008
Cyclic carbonate-modified siloxane, method of making, non-aqueous electrolytic solution, secondary battery, and capacitor
SHINETSU CHEMICAL CO11 citations84
US7211353B2May 1, 2007
Non-aqueous electrolytic solution and secondary battery
SHINETSU CHEMICAL CO12 citations84
US5300348AApr 5, 1994
Frame-supported pellicle for photolithography, comprising a fluorocarbon containing organopolysiloxane based adhesive
SHINETSU CHEMICAL CO20 citations84
US7459239B2Dec 2, 2008
Non-aqueous electrolytic solution and battery
SHINETSU CHEMICAL CO8 citations74
US5729325AMar 17, 1998
Pellicle for a mask or substrate
SHINETSU CHEMICAL CO14 citations74
US5597669AJan 28, 1997
Frame-supported pellicle for photolithography
SHINETSU CHEMICAL CO14 citations74
US5370951ADec 6, 1994
Frame-supported pellicle for protection of photolithographic mask
SHINETSU CHEMICAL CO16 citations74
US5327808AJul 12, 1994
Method for the preparation of a frame-supported pellicle for photolithography
SHINETSU CHEMICAL CO14 citations74
US5326649AJul 5, 1994
X-ray transmitting membrane for mask in x-ray lithography and method for preparing the same
SHINETSU CHEMICAL CO17 citations74
US5234609AAug 10, 1993
X-ray permeable membrane for X-ray lithographic mask
SHINETSU CHEMICAL CO14 citations74
US5199055AMar 30, 1993
X-ray lithographic mask blank with reinforcement
SHINETSU CHEMICAL CO14 citations74
US5118573AJun 2, 1992
Magneto-optical recording medium
SHINETSU CHEMICAL CO10 citations74
US4983701AJan 8, 1991
Silicone composition for rendering surfaces non-adherent
SHINETSU CHEMICAL CO10 citations74
US6350549B1Feb 26, 2002
Jig for producing pellicle and method for producing pellicle using the same
SHINETSU CHEMICAL CO11 citations73
US5419972AMay 30, 1995
Frame-supported pellicle for dustproof protection of photomask
SHINETSU CHEMICAL CO15 citations72
US5348919ASep 20, 1994
High-packing silicon nitride powder and method for making
SHINETSU CHEMICAL CO6 citations67
US7722995B2May 25, 2010
Non-aqueous electrolytic solution, secondary battery, and electrochemical capacitor
SHINETSU CHEMICAL CO2 citations63
US5656342AAug 12, 1997
End surface-protected frame-supported pellicle for photolithography
SHINETSU CHEMICAL CO6 citations63
US5368675ANov 29, 1994
Method for the preparation of a frame-supported pellicle for photolithography
SHINETSU CHEMICAL CO6 citations63
US5308567AMay 3, 1994
Method for the preparation of a resin membrane
SHINETSU CHEMICAL CO2 citations63
US5254419AOct 19, 1993
Method for dust-proofing in the manufacture of electronic devices and pellicle therefor
SHINETSU CHEMICAL CO2 citations63
US5246802ASep 21, 1993
X-ray permeable membrane for X-ray lithographic mask
SHINETSU CHEMICAL CO2 citations63
US5098515AMar 24, 1992
Method for the preparation of a silicon carbide-silicon nitride composite membrane for x-ray lithography
SHINETSU CHEMICAL CO4 citations63
US5089085AFeb 18, 1992
Silicon carbide membrane for x-ray lithography and method for the prepartion thereof
SHINETSU CHEMICAL CO2 citations63
US4895761AJan 23, 1990
Sheets with silicone-based surface-release film
SHINETSU CHEMICAL CO5 citations63
US5382554AJan 17, 1995
High-packing silicon nitride powder and method for making
SHINETSU CHEMICAL CO5 citations60
US7998263B2Aug 16, 2011
Sintered silicon oxide for film vapor deposition, its production method, and method for producing silicon oxide vapor deposition film
SHINETSU CHEMICAL CO0 citations52
US7544759B2Jun 9, 2009
Cyclic carbonate-modified organosilicon compound, non-aqueous electrolytic solution, secondary battery and capacitor
SHINETSU CHEMICAL CO0 citations52