Inventor
RUTTEN MATTHEW J
US18 patents
Patents
18 patentsUS6110832AAug 29, 2000
Method and apparatus for slurry polishing
IBM157 citations98
US5889293AMar 30, 1999
Electrical contact to buried SOI structures
IBM103 citations98
US5913713AJun 22, 1999
CMP polishing pad backside modifications for advantageous polishing results
IBM95 citations97
US5312777AMay 17, 1994
Fabrication methods for bidirectional field emission devices and storage structures
IBM64 citations96
US6495917B1Dec 17, 2002
Method and structure of column interconnect
IBM71 citations95
US5896870AApr 27, 1999
Method of removing slurry particles
IBM55 citations95
US6008083ADec 28, 1999
Precision analog metal-metal capacitor
IBM59 citations94
US5708559AJan 13, 1998
Precision analog metal-metal capacitor
IBM85 citations94
US6071803AJun 6, 2000
Electrical contact to buried SOI structures
IBM34 citations92
US5549511AAug 27, 1996
Variable travel carrier device and method for planarizing semiconductor wafers
IBM31 citations92
US6503827B1Jan 7, 2003
Method of reducing planarization defects
IBM42 citations91
US6171436B1Jan 9, 2001
Apparatus for removing slurry particles
IBM16 citations91
US5585674ADec 17, 1996
Transverse diffusion barrier interconnect structure
IBM14 citations74
US5488013AJan 30, 1996
Method of forming transverse diffusion barrier interconnect structure
IBM14 citations74
US5530262AJun 25, 1996
Bidirectional field emission devices, storage structures and fabrication methods
IBM11 citations73
US6245668B1Jun 12, 2001
Sputtered tungsten diffusion barrier for improved interconnect robustness
IBM14 citations72
US5877589AMar 2, 1999
Gas discharge devices including matrix materials with ionizable gas filled sealed cavities
IBM14 citations70
US6838364B2Jan 4, 2005
Sputtered tungsten diffusion barrier for improved interconnect robustness
IBM0 citations51