P

Inventor

ABE TOMOHIKO

JP35 patents
⚠️ This page may combine multiple inventors who share the name “ABE TOMOHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJITSU LTD

23 patents
US6646275B2Nov 11, 2003

Charged particle beam exposure system and method

FUJITSU LTD43 citations96
US6118129ASep 12, 2000

Method and system for exposing an exposure pattern on an object by a charged particle beam which is shaped into a plurality of beam elements

FUJITSU LTD30 citations96
US5977548ANov 2, 1999

Charged particle beam exposure system and method

FUJITSU LTD28 citations96
US5841145ANov 24, 1998

Method of and system for exposing pattern on object by charged particle beam

FUJITSU LTD60 citations96
US5614725AMar 25, 1997

Charged particle beam exposure system and method

FUJITSU LTD36 citations96
US5528048AJun 18, 1996

Charged particle beam exposure system and method

FUJITSU LTD47 citations96
US5359202AOct 25, 1994

Electron beam exposure apparatus employing blanking aperture array

FUJITSU LTD23 citations93
US6242751B1Jun 5, 2001

Charged-particle-beam exposure device and charged-particle-beam exposure method

FUJITSU LTD33 citations92
US6055719AMay 2, 2000

Method for manufacturing an electrostatic deflector

FUJITSU LTD22 citations92
US5969365AOct 19, 1999

Charged-particle-beam exposure device and charged-particle-beam exposure method

FUJITSU LTD20 citations92
US5920077AJul 6, 1999

Charged particle beam exposure system

FUJITSU LTD21 citations92
US5770862AJun 23, 1998

Charged particle exposure apparatus, and a charged particle exposure method

FUJITSU LTD20 citations92
US5757015AMay 26, 1998

Charged-particle-beam exposure device and charged-particle-beam exposure method

FUJITSU LTD25 citations92
US5719402AFeb 17, 1998

Method of and system for charged particle beam exposure

FUJITSU LTD32 citations92
US5546319AAug 13, 1996

Method of and system for charged particle beam exposure

FUJITSU LTD21 citations92
US5430304AJul 4, 1995

Blanking aperture array type charged particle beam exposure

FUJITSU LTD45 citations92
US5391886AFeb 21, 1995

Charged particle beam exposure system and method of exposing a pattern on an object by such a charged particle beam exposure system

FUJITSU LTD36 citations92
US5304811AApr 19, 1994

Lithography system using charged-particle beam and method of using the same

FUJITSU LTD23 citations92
US5965895AOct 12, 1999

Method of providing changed particle beam exposure in which representative aligning marks on an object are detected to calculate an actual position to perform exposure

FUJITSU LTD13 citations82
US5721432AFeb 24, 1998

Method of and system for charged particle beam exposure

FUJITSU LTD16 citations82
US5949078ASep 7, 1999

Charged-particle-beam exposure device and charged-particle-beam exposure method

FUJITSU LTD16 citations80
US5590048ADec 31, 1996

Block exposure pattern data extracting system and method for charged particle beam exposure

FUJITSU LTD12 citations74
US5872366AFeb 16, 1999

Charged-particle-beam exposure device and charged-particle-beam exposure method

FUJITSU LTD5 citations71

SONY CORP

5 patents

ADVANTEST CORP

3 patents

SEIKO EPSON CORP

1 patent

INTEL CORP

1 patent

NUFLARE TECHNOLOGY INC

1 patent

BRIDGESTONE CORP

1 patent