Inventor
LEE TSENG-CHUNG
US12 patents
⚠️ This page may combine multiple inventors who share the name “LEE TSENG-CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUCENT TECHNOLOGIES INC
7 patentsUS5654903AAug 5, 1997
Method and apparatus for real time monitoring of wafer attributes in a plasma etch process
LUCENT TECHNOLOGIES INC136 citations95
US5835221ANov 10, 1998
Process for fabricating a device using polarized light to determine film thickness
LUCENT TECHNOLOGIES INC56 citations94
US5739909AApr 14, 1998
Measurement and control of linewidths in periodic structures using spectroscopic ellipsometry
LUCENT TECHNOLOGIES INC240 citations93
US5653894AAug 5, 1997
Active neural network determination of endpoint in a plasma etch process
LUCENT TECHNOLOGIES INC80 citations93
US6228277B1May 8, 2001
Etch endpoint detection
LUCENT TECHNOLOGIES INC32 citations92
US6021215AFeb 1, 2000
Dynamic data visualization
LUCENT TECHNOLOGIES INC43 citations89
US5877407AMar 2, 1999
Plasma etch end point detection process
LUCENT TECHNOLOGIES INC24 citations89