Inventor
RIETMAN EDWARD ALOIS
US4 patents
Patents
4 patentsUS5653894AAug 5, 1997
Active neural network determination of endpoint in a plasma etch process
LUCENT TECHNOLOGIES INC80 citations93
US6021215AFeb 1, 2000
Dynamic data visualization
LUCENT TECHNOLOGIES INC43 citations89
US5877407AMar 2, 1999
Plasma etch end point detection process
LUCENT TECHNOLOGIES INC24 citations89
US5737496AApr 7, 1998
Active neural network control of wafer attributes in a plasma etch process
LUCENT TECHNOLOGIES INC51 citations87