Inventor

MATSUURA MASAZUMI

JP39 patents

⚠️ This page may combine multiple inventors who share the name “MATSUURA MASAZUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATSUURA MASAZUMI

MITSUBISHI ELECTRIC CORP

Semiconductor device having an interlayer insulating film of high crack resistance

Semiconductor device organic insulator film

Semiconductor device comprising an SiOF insulative film

Semiconductor device and method of fabricating the same

Method of making a semiconductor device

Method of manufacturing a semiconductor device having multilayer insulating films

Semiconductor device having improved insulation film and manufacturing method thereof

Semiconductor device and manufacturing process thereof

Ozone generating method

Method of manufacturing semiconductor device including interlaying insulating film

Semiconductor device including interlayer insulating film

Semiconductor device including nitride layer

Semiconductor manufacturing process with oxide film formed on an uneven surface pattern

Semiconductor device and manufacturing method thereof

Semiconductor device having improved insulation film and manufacturing method thereof

Method of manufacturing contact structure

Method for fabricating a dual damascene contact in an insulating film having density gradually varying in the thickness direction

Electronic device includes an insulating film having density or carbon concentration varying gradually in the direction of the thickness and a conductive film formed therein

Method of forming an interlayer insulating film

Method of manufacturing a semiconductor device with a planarized integrated circuit

Method of manufacturing semiconductor device and semiconductor device

Semiconductor device and method of manufacturing the same

Method of polishing a stack of dielectric layers including a fluorine containing silicon oxide layer

RENESAS ELECTRONICS CORP

Semiconductor chip with seal ring and sacrificial corner pattern

Method of manufacturing a semiconductor device

Semiconductor device and method of manufacturing the same

Semiconductor chip with seal ring and sacrificial corner pattern

Semiconductor device and manufacturing method thereof

Semiconductor device and manufacturing method thereof

Semiconductor device and method of fabricating the same

Semiconductor device and manufacturing method therefor

RENESAS TECH CORP

Semiconductor device with seal ring

Semiconductor device containing copper diffusion preventive film of silicon carbide

Method of forming dielectric film and dielectric film

Semiconductor device and method of fabricating the same

Semiconductor device and manufacturing method therefor

Method of manufacturing semiconductor device and semiconductor device

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

Semiconductor device which employs an interlayer insulating film of a low mechanical strength and a highly reliable metal pad, and a method of manufacturing the same

FURUSAWA TAKESHI

Semiconductor chip with seal ring and sacrificial corner pattern