Inventor

JAMIN FEN FEN

US7 patents

⚠️ This page may combine multiple inventors who share the name “JAMIN FEN FEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

4 patents

US6171513B1Jan 9, 2001

Chemical-mechanical polishing system having a bi-material wafer backing film and two-piece wafer carrier

IBM30 citations89

US6344414B1Feb 5, 2002

Chemical-mechanical polishing system having a bi-material wafer backing film assembly

IBM15 citations80

US6368969B1Apr 9, 2002

Chemical-mechanical polishing methods

IBM4 citations62

US7040966B2May 9, 2006

Carbonation of pH controlled KOH solution for improved polishing of oxide films on semiconductor wafers

IBM1 citations44

INFINEON TECHNOLOGIES CORP

1 patent

US6264789B1Jul 24, 2001

System for dispensing polishing liquid during chemical mechanical polishing of a semiconductor wafer

INFINEON TECHNOLOGIES CORP33 citations90

SIEMENS AG

1 patent

US6149830ANov 21, 2000

Composition and method for reducing dishing in patterned metal during CMP process

SIEMENS AG26 citations89

INFINEON TECHNOLOGIES NORHT AM

1 patent

US6225224B1May 1, 2001

System for dispensing polishing liquid during chemical mechanical polishing of a semiconductor wafer

INFINEON TECHNOLOGIES NORHT AM28 citations87