Inventor
NAGATOMO HIROTO
JP11 patents
Patents
11 patentsUS5536128AJul 16, 1996
Method and apparatus for carrying a variety of products
HITACHI LTD250 citations98
US5841893ANov 24, 1998
Inspection data analyzing system
HITACHI LTD76 citations95
US4731855AMar 15, 1988
Pattern defect inspection apparatus
HITACHI LTD74 citations94
US6185322B1Feb 6, 2001
Inspection system and method using separate processors for processing different information regarding a workpiece such as an electronic device
HITACHI LTD15 citations92
US4544318AOct 1, 1985
Manufacturing system
HITACHI LTD53 citations89
US4342515AAug 3, 1982
Method of inspecting the surface of an object and apparatus therefor
HITACHI LTD44 citations89
US4282825AAug 11, 1981
Surface treatment device
HITACHI LTD45 citations85
US6330352B1Dec 11, 2001
Inspection data analyzing system
HITACHI LTD11 citations81
US6628817B2Sep 30, 2003
Inspection data analyzing system
HITACHI LTD9 citations73
US6529619B2Mar 4, 2003
Inspection data analyzing system
HITACHI LTD9 citations73
US6339653B1Jan 15, 2002
Inspection data analyzing system
HITACHI LTD7 citations73