Inventor
TANIGUCHI YUZO
JP19 patents
Patents
19 patentsUS5274434ADec 28, 1993
Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line
HITACHI LTD218 citations99
US6471115B1Oct 29, 2002
Process for manufacturing electronic circuit devices
HITACHI LTD91 citations97
US6249242B1Jun 19, 2001
High-frequency transmitter-receiver apparatus for such an application as vehicle-onboard radar system
HITACHI LTD103 citations96
US5841893ANov 24, 1998
Inspection data analyzing system
HITACHI LTD76 citations95
US4731855AMar 15, 1988
Pattern defect inspection apparatus
HITACHI LTD74 citations94
US6650409B1Nov 18, 2003
Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system
HITACHI LTD39 citations92
US6185322B1Feb 6, 2001
Inspection system and method using separate processors for processing different information regarding a workpiece such as an electronic device
HITACHI LTD15 citations92
US5173719ADec 22, 1992
Method and apparatus for the inspection of patterns
HITACHI LTD63 citations89
US6346772B1Feb 12, 2002
Wiring substrate and gas discharge display device that includes a dry etched layer wet-etched first or second electrodes
HITACHI LTD13 citations81
US6330352B1Dec 11, 2001
Inspection data analyzing system
HITACHI LTD11 citations81
US6261144B1Jul 17, 2001
Wiring substrate and gas discharge display device and method therefor
HITACHI LTD14 citations81
US4019669AApr 26, 1977
Wire bonding apparatus
HITACHI LTD14 citations74
US6628817B2Sep 30, 2003
Inspection data analyzing system
HITACHI LTD9 citations73
US6621217B2Sep 16, 2003
Wiring substrate and gas discharge display device
HITACHI LTD8 citations73
US6529619B2Mar 4, 2003
Inspection data analyzing system
HITACHI LTD9 citations73
US6339653B1Jan 15, 2002
Inspection data analyzing system
HITACHI LTD7 citations73
US6429586B1Aug 6, 2002
Gas discharge display panel and gas discharge display device having electrodes formed by laser processing
HITACHI LTD7 citations72
US6343967B1Feb 5, 2002
Method of making gas discharge display panel and gas discharge display device
HITACHI LTD9 citations72
US6624575B2Sep 23, 2003
Method of making gas discharge display panel and gas discharge display device
HITACHI LTD0 citations51