Inventor
EBARA YUTAKA
JP6 patents
Patents
6 patentsUS5841893ANov 24, 1998
Inspection data analyzing system
HITACHI LTD76 citations95
US6185322B1Feb 6, 2001
Inspection system and method using separate processors for processing different information regarding a workpiece such as an electronic device
HITACHI LTD15 citations92
US6330352B1Dec 11, 2001
Inspection data analyzing system
HITACHI LTD11 citations81
US6628817B2Sep 30, 2003
Inspection data analyzing system
HITACHI LTD9 citations73
US6529619B2Mar 4, 2003
Inspection data analyzing system
HITACHI LTD9 citations73
US6339653B1Jan 15, 2002
Inspection data analyzing system
HITACHI LTD7 citations73