P

Inventor

LIM HYUN-SEOK

KR36 patents
⚠️ This page may combine multiple inventors who share the name “LIM HYUN-SEOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

24 patents
US6399491B2Jun 4, 2002

Method of manufacturing a barrier metal layer using atomic layer deposition

SAMSUNG ELECTRONICS CO LTD342 citations99
US6391769B1May 21, 2002

Method for forming metal interconnection in semiconductor device and interconnection structure fabricated thereby

SAMSUNG ELECTRONICS CO LTD177 citations99
US6348376B2Feb 19, 2002

Method of forming metal nitride film by chemical vapor deposition and method of forming metal contact and capacitor of semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD254 citations99
US6590251B2Jul 8, 2003

Semiconductor devices having metal layers as barrier layers on upper or lower electrodes of capacitors

SAMSUNG ELECTRONICS CO LTD627 citations98
US6372598B2Apr 16, 2002

Method of forming selective metal layer and method of forming capacitor and filling contact hole using the same

SAMSUNG ELECTRONICS CO LTD283 citations98
US6358829B2Mar 19, 2002

Semiconductor device fabrication method using an interface control layer to improve a metal interconnection layer

SAMSUNG ELECTRONICS CO LTD381 citations98
US6287965B1Sep 11, 2001

Method of forming metal layer using atomic layer deposition and semiconductor device having the metal layer as barrier metal layer or upper or lower electrode of capacitor

SAMSUNG ELECTRONICS CO LTD1,252 citations98
US7452783B2Nov 18, 2008

Capacitor for a semiconductor device and method of forming the same

SAMSUNG ELECTRONICS CO LTD6 citations74
US7199019B2Apr 3, 2007

Method for forming tungsten contact plug

SAMSUNG ELECTRONICS CO LTD7 citations73
US7812332B2Oct 12, 2010

Phase change memory device and method of forming the same

SAMSUNG ELECTRONICS CO LTD7 citations72
US11018045B2May 25, 2021

Deposition apparatus including upper shower head and lower shower head

SAMSUNG ELECTRONICS CO LTD5 citations69
US7719045B2May 18, 2010

Capacitor for a semiconductor device and method of forming the same

SAMSUNG ELECTRONICS CO LTD2 citations63
US7524724B2Apr 28, 2009

Method of forming titanium nitride layer and method of fabricating capacitor using the same

SAMSUNG ELECTRONICS CO LTD4 citations63
US7364967B2Apr 29, 2008

Methods of forming storage capacitors for semiconductor devices

SAMSUNG ELECTRONICS CO LTD6 citations63
US6806135B2Oct 19, 2004

Method of manufacturing a semiconductor device using a two-step deposition process

SAMSUNG ELECTRONICS CO LTD5 citations60
US7141512B2Nov 28, 2006

Method of cleaning semiconductor device fabrication apparatus

SAMSUNG ELECTRONICS CO LTD2 citations56
US11854979B2Dec 26, 2023

Semiconductor device

SAMSUNG ELECTRONICS CO LTD0 citations52
US10734493B2Aug 4, 2020

Semiconductor memory device and conductive structure

SAMSUNG ELECTRONICS CO LTD0 citations51
US7759159B2Jul 20, 2010

Variable resistance non-volatile memory cells and methods of fabricating same

SAMSUNG ELECTRONICS CO LTD1 citations51
US7736844B2Jun 15, 2010

Overlay mark and method of forming the same

SAMSUNG ELECTRONICS CO LTD1 citations50
US11345998B2May 31, 2022

Deposition apparatus including upper shower head and lower shower head

SAMSUNG ELECTRONICS CO LTD0 citations48
US10680008B2Jun 9, 2020

Methods of manufacturing semiconductor devices

SAMSUNG ELECTRONICS CO LTD0 citations48
US7538046B2May 26, 2009

Method of cleaning semiconductor device fabrication apparatus

SAMSUNG ELECTRONICS CO LTD0 citations45
US10797143B2Oct 6, 2020

Semiconductor devices and method of forming the same

SAMSUNG ELECTRONICS CO LTD0 citations41

LG INNOTEK CO LTD

5 patents

KIM DO-HYUNG

1 patent

LEE JEONG GIL

1 patent

YOON KI HYUN

1 patent

HAN HAUK

1 patent

MA YOUNG-TAE

1 patent

OH GYU-HWAN

1 patent

PARK KWANG CHUL

1 patent