Inventor
ASHJAEE JALAL
US24 patents
⚠️ This page may combine multiple inventors who share the name “ASHJAEE JALAL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUTOOL INC
7 patentsUS6482307B2Nov 19, 2002
Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing
NUTOOL INC126 citations97
US6468139B1Oct 22, 2002
Polishing apparatus and method with a refreshing polishing belt and loadable housing
NUTOOL INC26 citations92
US6464571B2Oct 15, 2002
Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein
NUTOOL INC19 citations92
US6852208B2Feb 8, 2005
Method and apparatus for full surface electrotreating of a wafer
NUTOOL INC20 citations91
US6736929B2May 18, 2004
Distributed control system for semiconductor manufacturing equipment
NUTOOL INC13 citations77
US6604988B2Aug 12, 2003
Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein
NUTOOL INC8 citations74
US6777338B2Aug 17, 2004
Edge and bevel cleaning process and system
NUTOOL INC7 citations73
ASM NUTOOL INC
7 patentsUS6988932B2Jan 24, 2006
Apparatus of sealing wafer backside for full-face processing
ASM NUTOOL INC18 citations92
US6939206B2Sep 6, 2005
Method and apparatus of sealing wafer backside for full-face electrochemical plating
ASM NUTOOL INC33 citations92
US6855037B2Feb 15, 2005
Method of sealing wafer backside for full-face electrochemical plating
ASM NUTOOL INC15 citations84
US6953392B2Oct 11, 2005
Integrated system for processing semiconductor wafers
ASM NUTOOL INC4 citations63
US6932679B2Aug 23, 2005
Apparatus and method for loading a wafer in polishing system
ASM NUTOOL INC3 citations63
US7059944B2Jun 13, 2006
Integrated system for processing semiconductor wafers
ASM NUTOOL INC3 citations62
US7122473B2Oct 17, 2006
Edge and bevel cleaning process and system
ASM NUTOOL INC0 citations52
NOVELLUS SYSTEMS INC
3 patentsUS7316602B2Jan 8, 2008
Constant low force wafer carrier for electrochemical mechanical processing and chemical mechanical polishing
NOVELLUS SYSTEMS INC6 citations63
US7427337B2Sep 23, 2008
System for electropolishing and electrochemical mechanical polishing
NOVELLUS SYSTEMS INC2 citations62
US7476304B2Jan 13, 2009
Apparatus for processing surface of workpiece with small electrodes and surface contacts
NOVELLUS SYSTEMS INC2 citations61
ACTIVE LAYER PARAMETRICS INC
3 patentsUS11699622B2Jul 11, 2023
Methods and apparatus for test pattern forming and film property measurement
ACTIVE LAYER PARAMETRICS INC1 citations57
US11289386B2Mar 29, 2022
Methods and apparatus for test pattern forming and film property measurement
ACTIVE LAYER PARAMETRICS INC1 citations57
US10790203B2Sep 29, 2020
Methods and systems for material property profiling of thin films
ACTIVE LAYER PARAMETRICS INC0 citations39