Inventor
PACKARD JOHN
US4 patents
Patents
4 patentsUS6607965B2Aug 19, 2003
Methods of forming capacitors
MICRON TECHNOLOGY INC7 citations72
US6583441B2Jun 24, 2003
Capacitor constructions comprising a nitrogen-containing layer over a rugged polysilicon layer
MICRON TECHNOLOGY INC11 citations72
US6791113B2Sep 14, 2004
Capacitor constructions comprising a nitrogen-containing layer over a rugged polysilicon layer
MICRON TECHNOLOGY INC0 citations51
US6562684B1May 13, 2003
Methods of forming dielectric materials
MICRON TECHNOLOGY INC0 citations51