Inventor
CHOU CHI-WU
TW4 patents
Patents
4 patentsUS6329234B1Dec 11, 2001
Copper process compatible CMOS metal-insulator-metal capacitor structure and its process flow
TAIWAN SEMICONDUCTOR MFG212 citations98
US6472721B2Oct 29, 2002
Dual damascene interconnect structures that include radio frequency capacitors and inductors
TAIWAN SEMICONDUCTOR MFG60 citations95
US6881996B2Apr 19, 2005
Metal-insulator-metal (MIM) capacitor structure in copper-CMOS circuits using a pad protect layer
TAIWAN SEMICONDUCTOR MFG15 citations83
US6812088B1Nov 2, 2004
Method for making a new metal-insulator-metal (MIM) capacitor structure in copper-CMOS circuits using a pad protect layer
TAIWAN SEMICONDUCTOR MFG11 citations73