Inventor
KOIZUMI YASUHIRO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “KOIZUMI YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
11 patentsUS6303932B1Oct 16, 2001
Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam
HITACHI LTD84 citations97
US5358806AOct 25, 1994
Phase shift mask, method of correcting the same and apparatus for carrying out the method
HITACHI LTD70 citations96
US6476387B1Nov 5, 2002
Method and apparatus for observing or processing and analyzing using a charged beam
HITACHI LTD44 citations92
US5786112AJul 28, 1998
Photomask manufacturing process and semiconductor integrated circuit device manufacturing process using the photomask
HITACHI LTD37 citations92
US5447614ASep 5, 1995
Method of processing a sample using a charged beam and reactive gases and system employing the same
HITACHI LTD31 citations92
US5439763AAug 8, 1995
Optical mask and method of correcting the same
HITACHI LTD24 citations92
US5342448AAug 30, 1994
Apparatus for processing a sample using a charged beam and reactive gases
HITACHI LTD39 citations92
US4704348ANov 3, 1987
Exposure of uniform fine pattern on photoresist
HITACHI LTD130 citations92
US4609566ASep 2, 1986
Method and apparatus for repairing defects on a photo-mask pattern
HITACHI LTD53 citations91
US6816134B2Nov 9, 2004
Plasma display panel
HITACHI LTD3 citations59
US6831413B2Dec 14, 2004
Plasma display panel
HITACHI LTD0 citations48