Inventor
LI JIPING
US43 patents
⚠️ This page may combine multiple inventors who share the name “LI JIPING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
22 patentsUS7026175B2Apr 11, 2006
High throughput measurement of via defects in interconnects
APPLIED MATERIALS INC137 citations95
US6906801B2Jun 14, 2005
Measuring a property of a layer in multilayered structure
APPLIED MATERIALS INC19 citations93
US6940592B2Sep 6, 2005
Calibration as well as measurement on the same workpiece during fabrication
APPLIED MATERIALS INC51 citations91
US9908200B2Mar 6, 2018
Apparatus and method of improving beam shaping and beam homogenization
APPLIED MATERIALS INC6 citations84
US7465591B2Dec 16, 2008
Evaluating a geometric or material property of a multilayered structure
APPLIED MATERIALS INC14 citations84
US9659809B2May 23, 2017
Support cylinder for thermal processing chamber
APPLIED MATERIALS INC6 citations83
US8652951B2Feb 18, 2014
Selective epitaxial germanium growth on silicon-trench fill and in situ doping
APPLIED MATERIALS INC11 citations83
US7379185B2May 27, 2008
Evaluation of openings in a dielectric layer
APPLIED MATERIALS INC11 citations83
US10128144B2Nov 13, 2018
Support cylinder for thermal processing chamber
APPLIED MATERIALS INC2 citations72
US8363320B2Jan 29, 2013
Method and apparatus for decorrelation of spatially and temporally coherent light
APPLIED MATERIALS INC2 citations63
US11490466B2Nov 1, 2022
Melt depth determination using infrared interferometric technique in pulsed laser annealing
APPLIED MATERIALS INC1 citations62
US11292079B2Apr 5, 2022
Laser noise elimination in transmission thermometry
APPLIED MATERIALS INC0 citations62
US10181409B2Jan 15, 2019
Thermal processing apparatus
APPLIED MATERIALS INC1 citations62
US9385004B2Jul 5, 2016
Support cylinder for thermal processing chamber
APPLIED MATERIALS INC1 citations62
US9285595B2Mar 15, 2016
Multiple beam combiner for laser processing apparatus
APPLIED MATERIALS INC1 citations62
US7804042B2Sep 28, 2010
Pryometer for laser annealing system compatible with amorphous carbon optical absorber layer
APPLIED MATERIALS INC3 citations62
US9953851B2Apr 24, 2018
Process sheet resistance uniformity improvement using multiple melt laser exposures
APPLIED MATERIALS INC0 citations52
US9927622B2Mar 27, 2018
Multiple beam combiner for laser processing apparatus
APPLIED MATERIALS INC0 citations52
US9508608B2Nov 29, 2016
Monitoring laser processing of semiconductors by raman spectroscopy
APPLIED MATERIALS INC0 citations52
US9390926B2Jul 12, 2016
Process sheet resistance uniformity improvement using multiple melt laser exposures
APPLIED MATERIALS INC0 citations52
US8693095B2Apr 8, 2014
Method and apparatus for decorrelation of spatially and temporally coherent light
APPLIED MATERIALS INC0 citations52
US9146337B2Sep 29, 2015
Apparatus for speckle reduction, pulse stretching, and beam homogenization
APPLIED MATERIALS INC0 citations51
LI JIPING
8 patentsUS8067302B2Nov 29, 2011
Defect-free junction formation using laser melt annealing of octadecaborane self-amorphizing implants
LI JIPING95 citations97
US8674257B2Mar 18, 2014
Automatic focus and emissivity measurements for a substrate system
LI JIPING8 citations84
US8582963B2Nov 12, 2013
Detection of substrate warping during rapid thermal processing
LI JIPING13 citations84
US10219325B2Feb 26, 2019
Melt depth determination using infrared interferometric technique in pulsed laser annealing
LI JIPING1 citations62
US10421151B2Sep 24, 2019
Laser noise elimination in transmission thermometry
LI JIPING1 citations61
US8939760B2Jan 27, 2015
Spike anneal residence time reduction in rapid thermal processing chambers
LI JIPING0 citations51
US8232503B2Jul 31, 2012
Pyrometer for laser annealing system
LI JIPING1 citations51
US8815719B2Aug 26, 2014
Defect-free junction formation using octadecaborane self-amorphizing implants
LI JIPING0 citations48
BOXER CROSS INC
4 patentsUS6054868AApr 25, 2000
Apparatus and method for measuring a property of a layer in a multilayered structure
BOXER CROSS INC94 citations98
US6049220AApr 11, 2000
Apparatus and method for evaluating a wafer of semiconductor material
BOXER CROSS INC151 citations98
US6812047B1Nov 2, 2004
Evaluating a geometric or material property of a multilayered structure
BOXER CROSS INC41 citations92
US6911349B2Jun 28, 2005
Evaluating sidewall coverage in a semiconductor wafer
BOXER CROSS INC16 citations84