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Inventor
MADSEN JON
US
3 patents
⚠️ This page may combine multiple inventors who share the name “MADSEN JON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
2 patents
US10943838B2
Mar 9, 2021
Measurement of overlay error using device inspection system
KLA TENCOR CORP
6 citations
80
US11784097B2
Oct 10, 2023
Measurement of overlay error using device inspection system
KLA TENCOR CORP
0 citations
58
APPLIED MATERIALS INC
1 patent
US6940592B2
Sep 6, 2005
Calibration as well as measurement on the same workpiece during fabrication
APPLIED MATERIALS INC
51 citations
91