Inventor
LIN SHUI-TIEN
TW5 patents
Patents
5 patentsUS7206721B1Apr 17, 2007
Methods and systems of offline measurement for process tool monitoring
TAIWAN SEMICONDUCTOR MFG10 citations80
US6947801B2Sep 20, 2005
Method and system for synchronizing control limit and equipment performance
TAIWAN SEMICONDUCTOR MFG8 citations69
US7035705B2Apr 25, 2006
System and method for process contamination prevention for semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG4 citations59
US6865438B1Mar 8, 2005
Method of using time interval in IC foundry to control feed back system
TAIWAN SEMICONDUCTOR MFG4 citations59
US7687211B2Mar 30, 2010
System and method for photolithography in semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG1 citations49