Inventor
DESHMUKH SUBHASH
US13 patents
⚠️ This page may combine multiple inventors who share the name “DESHMUKH SUBHASH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS9576810B2Feb 21, 2017
Process for etching metal using a combination of plasma and solid state sources
APPLIED MATERIALS INC40 citations94
US7968469B2Jun 28, 2011
Method of processing a workpiece in a plasma reactor with variable height ground return path to control plasma ion density uniformity
APPLIED MATERIALS INC46 citations94
US9411237B2Aug 9, 2016
Resist hardening and development processes for semiconductor device manufacturing
APPLIED MATERIALS INC11 citations84
US7879731B2Feb 1, 2011
Improving plasma process uniformity across a wafer by apportioning power among plural VHF sources
APPLIED MATERIALS INC13 citations84
US9378941B2Jun 28, 2016
Interface treatment of semiconductor surfaces with high density low energy plasma
APPLIED MATERIALS INC3 citations72
US7884025B2Feb 8, 2011
Plasma process uniformity across a wafer by apportioning ground return path impedances among plural VHF sources
APPLIED MATERIALS INC4 citations63
US7846846B2Dec 7, 2010
Method of preventing etch profile bending and bowing in high aspect ratio openings by treating a polymer formed on the opening sidewalls
APPLIED MATERIALS INC4 citations62
US9721802B2Aug 1, 2017
LED based optical source coupled with plasma source
APPLIED MATERIALS INC0 citations51
LAM RES CORP
2 patentsCOLLINS KENNETH S
2 patentsUS8076247B2Dec 13, 2011
Plasma process uniformity across a wafer by controlling RF phase between opposing electrodes
COLLINS KENNETH S11 citations83
US8080479B2Dec 20, 2011
Plasma process uniformity across a wafer by controlling a variable frequency coupled to a harmonic resonator
COLLINS KENNETH S6 citations73