Inventor
KITAHARA SHIGENORI
JP21 patents
⚠️ This page may combine multiple inventors who share the name “KITAHARA SHIGENORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
19 patentsUS6029371AFeb 29, 2000
Drying treatment method and apparatus
TOKYO ELECTRON LTD107 citations97
US6299696B2Oct 9, 2001
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD69 citations96
US6009890AJan 4, 2000
Substrate transporting and processing system
TOKYO ELECTRON LTD75 citations96
US5817185AOct 6, 1998
Method for washing substrates
TOKYO ELECTRON LTD48 citations96
US5730162AMar 24, 1998
Apparatus and method for washing substrates
TOKYO ELECTRON LTD67 citations96
US6827814B2Dec 7, 2004
Processing apparatus, processing system and processing method
TOKYO ELECTRON LTD45 citations92
US6394110B2May 28, 2002
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD30 citations92
US6203627B1Mar 20, 2001
Cleaning method
TOKYO ELECTRON LTD18 citations92
US6158447ADec 12, 2000
Cleaning method and cleaning equipment
TOKYO ELECTRON LTD44 citations92
US6082381AJul 4, 2000
Treatment apparatus
TOKYO ELECTRON LTD25 citations92
US5911232AJun 15, 1999
Ultrasonic cleaning device
TOKYO ELECTRON LTD39 citations92
US5482068AJan 9, 1996
Cleaning apparatus
TOKYO ELECTRON LTD42 citations92
US6138698AOct 31, 2000
Ultrasonic cleaning apparatus
TOKYO ELECTRON LTD50 citations89
US6253775B1Jul 3, 2001
Cleaning apparatus
TOKYO ELECTRON LTD21 citations88
US7108003B2Sep 19, 2006
Ultrasonic cleaning apparatus
TOKYO ELECTRON LTD9 citations74
US6318386B1Nov 20, 2001
Treatment apparatus
TOKYO ELECTRON LTD14 citations74
US6592678B1Jul 15, 2003
Cleaning method and cleaning equipment
TOKYO ELECTRON LTD12 citations73
US6293288B2Sep 25, 2001
Cleaning method and apparatus
TOKYO ELECTRON LTD7 citations73
US9960069B2May 1, 2018
Joining device and joining system
TOKYO ELECTRON LTD2 citations71