Inventor
ALGOTS JOHN MARTIN
US9 patents
⚠️ This page may combine multiple inventors who share the name “ALGOTS JOHN MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
5 patentsUS7217940B2May 15, 2007
Collector for EUV light source
CYMER INC60 citations97
US7087914B2Aug 8, 2006
High repetition rate laser produced plasma EUV light source
CYMER INC109 citations97
US6904073B2Jun 7, 2005
High power deep ultraviolet laser with long life optics
CYMER INC78 citations95
US7346093B2Mar 18, 2008
DUV light source optical element improvements
CYMER INC8 citations71
US7079556B2Jul 18, 2006
Bandwidth control technique for a laser
CYMER INC3 citations62