Inventor
PAN XIAOJIANG
US8 patents
Patents
8 patentsUS7217940B2May 15, 2007
Collector for EUV light source
CYMER INC60 citations97
US6359922B1Mar 19, 2002
Single chamber gas discharge laser with line narrowed seed beam
CYMER INC102 citations97
US6904073B2Jun 7, 2005
High power deep ultraviolet laser with long life optics
CYMER INC78 citations95
US6693939B2Feb 17, 2004
Laser lithography light source with beam delivery
CYMER INC115 citations95
US7016388B2Mar 21, 2006
Laser lithography light source with beam delivery
CYMER INC15 citations81
US7291853B2Nov 6, 2007
Discharge produced plasma EUV light source
CYMER INC9 citations73
US7346093B2Mar 18, 2008
DUV light source optical element improvements
CYMER INC8 citations71
US6839372B2Jan 4, 2005
Gas discharge ultraviolet laser with enclosed beam path with added oxidizer
CYMER INC8 citations68