Inventor
SANDLIN MICHAEL
US3 patents
Patents
3 patentsUS7175802B2Feb 13, 2007
Refurbishing spent sputtering targets
HERAEUS INC53 citations94
US6797137B2Sep 28, 2004
Mechanically alloyed precious metal magnetic sputtering targets fabricated using rapidly solidfied alloy powders and elemental Pt metal
HERAEUS INC21 citations87
US7229588B2Jun 12, 2007
Mechanically alloyed precious metal magnetic sputtering targets fabricated using rapidly solidified alloy powders and elemental Pt metal
HERAEUS INC8 citations68